Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5238859 | Method of manufacturing semiconductor device | Toshiro Usami, Yuuichi Mikata | 1993-08-24 |
| 5032535 | Method of manufacturing semiconductor device | Toshiro Usami, Yuuichi Mikata | 1991-07-16 |
| 4958373 | Defect-recognition processing apparatus | Toshiro Usami, Takao Ohta, Masanobu Ogino | 1990-09-18 |
| 4931405 | Method for manufacturing a semiconductor device and suppressing the generation of bulk microdefects near the substrate surface layer | Yuuichi Mikata | 1990-06-05 |