Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9303976 | Substrate processing system and substrate processing program | Masahiro Uekita, Hiroshi Koizumi, Tomomichi Naka, Naoaki Sakurai | 2016-04-05 |
| 7911921 | Diffraction optical element, molding die for the optical element and manufacturing method thereof | Hideki Ide, Masahiro Uekita | 2011-03-22 |
| 6640795 | Dresser, polishing apparatus and method for producing an article | Yasutada Nakagawa, Masatoshi Higuchi | 2003-11-04 |
| 6267646 | Polishing machine | — | 2001-07-31 |
| 6113467 | Polishing machine and polishing method | — | 2000-09-05 |