Issued Patents All Time
Showing 26–28 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8168528 | Restoration method using metal for better CD controllability and Cu filing | Yoshihiro Uozumi | 2012-05-01 |
| 8138097 | Method for processing semiconductor structure and device based on the same | Masao Ishikawa | 2012-03-20 |
| 8134234 | Application of Mn for damage restoration after etchback | — | 2012-03-13 |