Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7580111 | Liquid for immersion exposure and immersion exposure method | Hiroaki Nemoto, Yong Wang | 2009-08-25 |
| 7371503 | Sulfonium salt compound, photoacid generator, and positive-tone radiation-sensitive resin composition | Hirokazu Niwata, Satoshi Ebata, Yong Wang | 2008-05-13 |