Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7371503 | Sulfonium salt compound, photoacid generator, and positive-tone radiation-sensitive resin composition | Takashi Miyamatsu, Satoshi Ebata, Yong Wang | 2008-05-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7371503 | Sulfonium salt compound, photoacid generator, and positive-tone radiation-sensitive resin composition | Takashi Miyamatsu, Satoshi Ebata, Yong Wang | 2008-05-13 |