Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8686101 | Coating liquid for forming low dielectric constant amorphous silica-based coating film and the coating film obtained from the same | Miki Egami, Akira Nakashima, Michio Komatsu | 2014-04-01 |
| 7998567 | Coating liquid for formation of protective film for semiconductor processing and method for preparation of the same | Miki Egami, Akira Nakashima, Michio Komatsu | 2011-08-16 |
| 5800797 | Process for producing alumina and apparatus therefor | Hiroshi Matsumoto, Morio Fukuda | 1998-09-01 |