Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6148764 | Multiple micro inlet silane injection system for the jet vapor deposition of silicon nitride with a microwave discharge jet source | Takashi Tamagawa, Bret Halpern | 2000-11-21 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6148764 | Multiple micro inlet silane injection system for the jet vapor deposition of silicon nitride with a microwave discharge jet source | Takashi Tamagawa, Bret Halpern | 2000-11-21 |