| 6509067 |
Method and apparatus for the deposition of metal nanoclusters and films on a substrate |
— |
2003-01-21 |
| 6165554 |
Method for hydrogen atom assisted jet vapor deposition for parylene N and other polymeric thin films |
Raymond F. Graves |
2000-12-26 |
| 6148764 |
Multiple micro inlet silane injection system for the jet vapor deposition of silicon nitride with a microwave discharge jet source |
Guang-Ji Cui, Takashi Tamagawa |
2000-11-21 |
| 5725672 |
Apparatus for the high speed, low pressure gas jet deposition of conducting and dielectric thin sold films |
Jerome J. Schmitt |
1998-03-10 |
| 5720821 |
Jet vapor deposition of organic molecule guest-inorganic host thin films |
— |
1998-02-24 |
| 5650197 |
Jet vapor deposition of organic molecule guest-inorganic host thin films |
— |
1997-07-22 |
| 5571332 |
Electron jet vapor deposition system |
— |
1996-11-05 |
| 5356672 |
Method for microwave plasma assisted supersonic gas jet deposition of thin films |
Jerome J. Schmitt |
1994-10-18 |
| 5356673 |
Evaporation system and method for gas jet deposition of thin film materials |
Jerome J. Schmitt |
1994-10-18 |
| 5256205 |
Microwave plasma assisted supersonic gas jet deposition of thin film materials |
Jerome J. Schmitt |
1993-10-26 |