Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4963463 | Radiation-sensitive resin composition with admixtures of O-quinone diazide and acid esters having nitrobenzyl or cyanobenzyl group | Keiichi Yamada, Yoshiyuki Harita, Bruno Roland, Jan Vandendriesshe | 1990-10-16 |
| 4957588 | Method for high temperature reaction process | Yoshiyuki Harita, Yuuji Furuto, Bruno Roland, Ria Lombaerts | 1990-09-18 |
| 4886565 | Reactive ion etching apparatus | Keiichi Yamada, Yoshiyuki Harita, Shin'ichi Kawamura, Yuuji Furuto | 1989-12-12 |