Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12073977 | Method for manufacturing reactor, and reactor | Makoto Chiba, Hiromasa Kaibe | 2024-08-27 |
| 9028658 | Mn-containing copper alloy sputtering target generating few particles | Masahiko Wada, Masato Koide | 2015-05-12 |
| 6660665 | Platen for electrostatic wafer clamping apparatus | Hiroaki Yanagida, Hideaki Matsubara, Yoshiki Okuhara, Naoki Kawashima, Bruce T. Williams +1 more | 2003-12-09 |
| 6178975 | Waste water classifying recovery apparatus in wafer cleaning system | — | 2001-01-30 |