| 11681227 |
Enhanced EUV photoresist materials, formulations and processes |
Alex Phillip Graham Robinson, Carmen Popescu, John Roth, Edward A. Jackson, Alexandra McClelland +2 more |
2023-06-20 |
| 11474430 |
Multiple trigger monomer containing photoresist compositions and method |
Alex Philip Graham Robinson, Alexandra McClelland, Dongxu Yang, John Roth, David Ure |
2022-10-18 |
| 10438808 |
Hard-mask composition |
Alex Philip Graham Robinson, Thomas Lada, John Roth, Alan G. Brown, Edward A. Jackson |
2019-10-08 |
| 10095112 |
Multiple trigger photoresist compositions and methods |
Alex Phillip Graham Robinson, Alexandra McClelland, Dongxu Yang, John Roth |
2018-10-09 |
| 9632409 |
Fullerenes |
Alex Phillip Graham Robinson, Richard Edward Palmer, Dongxu Yang |
2017-04-25 |
| 9519215 |
Composition of matter and molecular resist made therefrom |
Alex Phillip Graham Robinson, Dongxu Yang, Thomas Lada, John Roth, Xiang Xue +1 more |
2016-12-13 |
| 9383646 |
Two-step photoresist compositions and methods |
Alex Philip Graham Robinson, Alan G. Brown, Thomas Lada |
2016-07-05 |
| 9323149 |
Methanofullerenes |
Alex Philip Graham Robinson, Jon Andrew Preece, Richard Edward Palmer, Dongxu Yang, Alexandra McClelland +2 more |
2016-04-26 |
| 9256126 |
Methanofullerenes |
Alex Philip Graham Robinson, Jon Andrew Preece, Richard Edward Palmer, Dongxu Yang, Alexandra McClelland +2 more |
2016-02-09 |
| 9229322 |
Composition of matter and molecular resist made therefrom |
Alex Phillip Graham Robinson, Dongxu Yang, Thomas Lada, John Roth, Xiang Xue +1 more |
2016-01-05 |
| 9122156 |
Composition of matter and molecular resist made therefrom |
Alex Philip Graham Robinson, Dongxu Yang, Thomas Lada, John Roth, Xiang Xue +1 more |
2015-09-01 |