Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5166856 | Electrostatic chuck with diamond coating | James A. Seirmarco | 1992-11-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5166856 | Electrostatic chuck with diamond coating | James A. Seirmarco | 1992-11-24 |