TM

Tibor Mohacsy

Overall (All Time): #3,196,183 of 4,157,543Top 80%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
8115240 CMOS integrated process for fabricating monocrystalline silicon micromechanical elements by porous silicon micromachining Antalné Ádám, Istvan Barsony, Csaba Ducso, Magdolna Eros, Károlyné Payer +1 more 2012-02-14