Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8115240 | CMOS integrated process for fabricating monocrystalline silicon micromechanical elements by porous silicon micromachining | Istvan Barsony, Csaba Ducso, Magdolna Eros, Tibor Mohacsy, Károlyné Payer +1 more | 2012-02-14 |