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Saeng Hyun CHO

Overall (All Time): #1,827,546 of 4,157,543Top 45%

2 Patents All Time

Issued Patents All Time

Showing 1–2 of 2 patents

Patent #	Title	Co-Inventors	Date
11823940	Electrostatic chuck and manufacturing method therefor	—	2023-11-21
9818581	Dielectric window supporting structure for inductively coupled plasma processing apparatus	—	2017-11-14