Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6050216 | Showerhead electrode for plasma processing | Matthew Peter Szapucki, Richard Kulkaski, Trevor J. Hadley, Mark Anthony Santorelli | 2000-04-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6050216 | Showerhead electrode for plasma processing | Matthew Peter Szapucki, Richard Kulkaski, Trevor J. Hadley, Mark Anthony Santorelli | 2000-04-18 |