Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6244641 | Wafer transfer arm | Matthew Peter Szapucki, Richard Kulkaski, Trevor J. Hadley | 2001-06-12 |
| 6237528 | Showerhead electrode assembly for plasma processing | Matthew Peter Szapucki, Richard Kulkaski, Trevor J. Hadley | 2001-05-29 |
| 6170432 | Showerhead electrode assembly for plasma processing | Matthew Peter Szapucki, Richard Kulkaski, Trevor J. Hadley | 2001-01-09 |
| 6050216 | Showerhead electrode for plasma processing | Matthew Peter Szapucki, Richard Kulkaski, Trevor J. Hadley, Robert H. Stoever | 2000-04-18 |