Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5965047 | Rapid thermal processing (RTP) system with rotating substrate | Werner Blersch, Michael Maurer, Helmut Merkle, Thomas Theiler, Heinrich Walk | 1999-10-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5965047 | Rapid thermal processing (RTP) system with rotating substrate | Werner Blersch, Michael Maurer, Helmut Merkle, Thomas Theiler, Heinrich Walk | 1999-10-12 |