Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11099068 | Optical instrumentation including a spatially variable filter | Scott A. Chalmers, Randall S. Geels | 2021-08-24 |
| 10988703 | Metal working fluid | Anthony Jarvis, Carl Williams, Richard Galsworthy | 2021-04-27 |
| 10479953 | Emulsifier for use in lubricating oil | Andrew Yeung, Anthony Jarvis | 2019-11-19 |
| 10240981 | Optical spectrometer configuration including spatially variable filter (SVF) | Scott A. Chalmers, Randall S. Geels | 2019-03-26 |
| 7309514 | Electron beam modification of CVD deposited films, forming low dielectric constant materials | Heike Thompson, Jingjun Yang | 2007-12-18 |
| 6989227 | E-beam curable resist and process for e-beam curing the resist | Timothy Weidman, William R. Livesay | 2006-01-24 |
| 6900001 | Method for modifying resist images by electron beam exposure | William R. Livesay | 2005-05-31 |
| 6890825 | Method for controlling dopant profiles and dopant activation by electron beam processing | Charles Hannes, William R. Livesay | 2005-05-10 |
| 6831005 | Electron beam process during damascene processing | — | 2004-12-14 |
| 6753129 | Method and apparatus for modification of chemically amplified photoresist by electron beam exposure | William R. Livesay, Richard L. Ross | 2004-06-22 |
| 6607991 | Method for curing spin-on dielectric films utilizing electron beam radiation | William R. Livesay, Anthony L. Rubiales, Heike Thompson, Selmer Wong, Trey Marlowe +1 more | 2003-08-19 |
| 6582777 | Electron beam modification of CVD deposited low dielectric constant materials | Heike Thompson, Jingjun Yang | 2003-06-24 |
| 6551926 | Electron beam annealing of metals, alloys, nitrides and silicides | — | 2003-04-22 |
| 6548899 | Method of processing films prior to chemical vapor deposition using electron beam processing | — | 2003-04-15 |
| 6489225 | Method for controlling dopant profiles and dopant activation by electron beam processing | Charles Hannes, William R. Livesay | 2002-12-03 |
| 6426127 | Electron beam modification of perhydrosilazane spin-on glass | Heike Thompson | 2002-07-30 |
| 6358670 | Enhancement of photoresist plasma etch resistance via electron beam surface cure | Selmer Wong | 2002-03-19 |
| 6319655 | Modification of 193 nm sensitive photoresist materials by electron beam exposure | Selmer Wong | 2001-11-20 |
| 6271146 | Electron beam treatment of fluorinated silicate glass | — | 2001-08-07 |
| 6207555 | Electron beam process during dual damascene processing | — | 2001-03-27 |
| 6204201 | Method of processing films prior to chemical vapor deposition using electron beam processing | — | 2001-03-20 |
| 6177143 | Electron beam treatment of siloxane resins | Carl Treadwell, Jingjun Yang | 2001-01-23 |
| 6132814 | Method for curing spin-on-glass film utilizing electron beam radiation | William R. Livesay, Anthony L. Rubiales | 2000-10-17 |