Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7115526 | Method for wet etching of high k thin film at low temperature | Chih-Cheng Wang, Hsiao Shih-Yi, Kang Tsung-Kuei, Bing-Yue Tsui, Chih-Feng Huang +4 more | 2006-10-03 |
| 6793836 | Puddle etching method of thin film by using spin-processor | Kang Tsung-Kuei, Chih-Cheng Wang, Hsiao Shih-Yi | 2004-09-21 |