HT

Hiroko Takeuchi

HH Hitachi High-Technologies: 1 patents #674 of 1,200Top 60%
Overall (All Time): #2,712,222 of 4,157,543Top 70%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
10930468 Charged particle beam apparatus using focus evaluation values for pattern length measurement Akemi Kondo 2021-02-23