Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10930468 | Charged particle beam apparatus using focus evaluation values for pattern length measurement | Hiroko Takeuchi | 2021-02-23 |
| 9230182 | Device for setting image acquisition conditions, and computer program | Yukari Yamada | 2016-01-05 |