Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7665416 | Apparatus for generating excited and/or ionized particles in a plasma and a method for generating ionized particles | Alexander Gschwandtner, Josef Mathuni, Alexander Mattheus, Stephan Schneider, Jürgen Sellmaier | 2010-02-23 |
| 6706141 | Device to generate excited/ionized particles in a plasma | Alexander Gschwandtner, Josef Mathuni | 2004-03-16 |
| 5489362 | Method for generating excited neutral particles for etching and deposition processes in semiconductor technology with a plasma discharge fed by microwave energy | Josef Mathuni | 1996-02-06 |