Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5202291 | High CF.sub.4 flow-reactive ion etch for aluminum patterning | Peter K. Charvat | 1993-04-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5202291 | High CF.sub.4 flow-reactive ion etch for aluminum patterning | Peter K. Charvat | 1993-04-13 |