Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 12406197 | Prediction and metrology of stochastic photoresist thickness defects | Anatoly Burov, Kunlun Bai, Pradeep Vukkadala, Cao Zhang, John S. Graves +2 more | 2025-09-02 | |
| 11966156 | Lithography mask repair by simulation of photoresist thickness evolution | Pradeep Vukkadala, Kunlun Bai, Xiaohan Li, Anatoly Burov, Cao Zhang +2 more | 2024-04-23 | $90,253,000 |
| 11868689 | Systems and methods for setting up a physics-based model | Chad Huard, Premkumar Panneerchelvam, Ankur Agarwal | 2024-01-09 | $250,443,000 |