Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7803715 | Lithographic patterning for sub-90nm with a multi-layered carbon-based hardmask | Shai Haimson, Michael Shifrin | 2010-09-28 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7803715 | Lithographic patterning for sub-90nm with a multi-layered carbon-based hardmask | Shai Haimson, Michael Shifrin | 2010-09-28 |