Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7662723 | Methods and apparatus for in-situ substrate processing | Guang-Yaw Hwang, Pu-Lun Lui | 2010-02-16 |
| 7479458 | Methods and apparatus for the optimization of highly selective process gases | Guang-Yaw Hwang, Thomas D. Nguyen, Wen-Ben Chou, Timothy Tran | 2009-01-20 |