Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387921 | Apparatus diagnostic apparatus, apparatus diagnostic method, plasma processing apparatus and semiconductor device manufacturing system | Shota Umeda, Masahiro Sumiya, Kenji Tamaki | 2025-08-12 |
| 12080529 | Plasma processing apparatus and prediction method of the condition of plasma processing apparatus | Masahiro Sumiya | 2024-09-03 |
| 11107664 | Plasma processing apparatus and prediction apparatus of the condition of plasma processing apparatus | Masahiro Sumiya | 2021-08-31 |
| 10886110 | Plasma processing apparatus and prediction method of the condition of plasma processing apparatus | Masahiro Sumiya | 2021-01-05 |
| 10184173 | Plasma processing method | Takahiro Yonemoto, Masahiro Sumiya, Junya Sasaki | 2019-01-22 |