Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11157027 | Heater alarm and control module | Long Xie | 2021-10-26 |
| 10809749 | Temperature controller | Long Xie | 2020-10-20 |
| 9314824 | Powder and deposition control in throttle valves | Matthew C. Grout | 2016-04-19 |
| 9206919 | Corrosion and deposition protected valve apparatus and method | David Neumeister, Bradly Raymond Lefevre, Kevin Grout | 2015-12-08 |
| 9200711 | Method of two-stage flow control | David Neumeister, Kevin Grout | 2015-12-01 |
| 8679287 | Method and apparatus for preventing ALD reactants from damaging vacuum pumps | David Neumeister | 2014-03-25 |
| 8671987 | Two-stage, slow-start valve apparatus | David Neumeister, Kevin Grout | 2014-03-18 |
| 8541716 | Heater control with high-limit thermal safety shutdown | Jeffrey D. Kiernan, Charles C. Lawhead, William Bohlinger, Eric Ellis, Curtis Asa Foster +8 more | 2013-09-24 |
| 8172197 | Fast-acting pneumatic diaphragm valve | Sven Nuesken | 2012-05-08 |
| 7962294 | Integrated absolute and differential pressure transducer | Paul Dozoretz, Garry Holcomb, Ole Wenzel | 2011-06-14 |
| 7932480 | Multiple heater control system with expandable modular functionality | Jeffrey D. Kiernan, Charles C. Lawhead, William Bohlinger, Eric Ellis, Curtis Asa Foster +8 more | 2011-04-26 |
| 7871587 | Reactive chemical containment system | Paul Dozoretz | 2011-01-18 |
| 7477996 | Integrated absolute and differential pressure transducer | Paul Dozoretz, Garry Holcomb, Ole Wenzel | 2009-01-13 |
| 7455720 | Method and apparatus for preventing products of TiCL4 and NH3 or other feed gas reactions from damaging vacuum pumps in TiN or other deposition systems | — | 2008-11-25 |
| 7076920 | Method of using a combination differential and absolute pressure transducer for controlling a load lock | Garry Holcomb, James Stafford, James Mueller, Stacy Wade | 2006-07-18 |
| 6909975 | Integrated absolute and differential pressure transducer | Paul Dozoretz, Garry Holcomb, Ole Wenzel | 2005-06-21 |
| 6895178 | Vapor delivery system | Paul Dozoretz, Benjamin Goss, David Neumeister, James Mueller, Donald W. Higgins | 2005-05-17 |
| 6790258 | Method for removing condensable aluminum chloride vapor from aluminum etch effluent | — | 2004-09-14 |
| 6672171 | Combination differential and absolute pressure transducer for load lock control | Garry Holcomb, Ole Wenzel | 2004-01-06 |
| 6562109 | Acceleration assisted particle/gas separation system | Darren Livingston, Paul Dozoretz, James Mueller | 2003-05-13 |
| 6488745 | Trap apparatus and method for condensable by-products of deposition reactions | — | 2002-12-03 |
| 6361607 | Apparatus for controlling polymerized teos build-up in vacuum pump lines | Paul Dozoretz | 2002-03-26 |
| 6238514 | Apparatus and method for removing condensable aluminum vapor from aluminum etch effluent | — | 2001-05-29 |
| 6197119 | Method and apparatus for controlling polymerized teos build-up in vacuum pump lines | Paul Dozoretz | 2001-03-06 |
| 5827370 | Method and apparatus for reducing build-up of material on inner surface of tube downstream from a reaction furnace | — | 1998-10-27 |