Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6741328 | Exposure apparatus and its control method, stage apparatus, and device manufacturing method | Masami Yonekawa | 2004-05-25 |
| 6330052 | Exposure apparatus and its control method, stage apparatus, and device manufacturing method | Masami Yonekawa | 2001-12-11 |