Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7264681 | Cleaning apparatus and cleaning method | Ryosuke Yonekura, Yukiko Nishioka, Mitsuo Miyashita | 2007-09-04 |
| 7155963 | Cleaning evaluation method for a substrate | Yukiko Nishioka | 2007-01-02 |
| 7077730 | Method and apparatus for polishing a workpiece | Tatsuya Kohama, Yukiko Nishioka | 2006-07-18 |