| 10892348 |
Method of rounding fin-shaped structure |
Hao-Hsuan Chang, Bin-Siang Tsai, Ting-An Chien |
2021-01-12 |
| 10796943 |
Manufacturing method of semiconductor structure |
Chun-Wei Yu, Yu-Ren Wang, Shi-You Liu, Shao-Hua Hsu |
2020-10-06 |
| 10651174 |
FinFET structure and fabricating method of gate structure |
Kuang-Hsiu Chen, Chun-Wei Yu, Chueh-Yang Liu, Yu-Ren Wang |
2020-05-12 |
| 10622481 |
Method of rounding corners of a fin |
Chun-Wei Yu, Yu-Ren Wang, Hao-Hsuan Chang, Chia-Wei Hsu |
2020-04-14 |
| 10446667 |
Method for fabricating semiconductor device |
Yu-Ying Lin, Sung-Yuan Tsai, Chun-Wei Yu, Yu-Ren Wang, Zhen-Cheng Wu +1 more |
2019-10-15 |
| 10340268 |
FinFET structure and fabricating method of gate structure |
Kuang-Hsiu Chen, Chun-Wei Yu, Chueh-Yang Liu, Yu-Ren Wang |
2019-07-02 |
| 10332741 |
Method for post chemical mechanical polishing clean |
Kuang-Hsiu Chen, Chun-Wei Yu, Yu-Ren Wang |
2019-06-25 |
| 10332981 |
Semiconductor device and method for fabricating the same |
Yu-Ying Lin, Sung-Yuan Tsai, Chun-Wei Yu, Yu-Ren Wang, Zhen-Cheng Wu +1 more |
2019-06-25 |
| 10312084 |
Semiconductor device and fabrication method thereof |
Kuang-Hsiu Chen, Chueh-Yang Liu, Yu-Ren Wang |
2019-06-04 |
| 9966266 |
Apparatus for semiconductor wafer treatment and semiconductor wafer treatment |
Yu-Ying Lin, Chueh-Yang Liu, Yu-Ren Wang, Chun-Wei Yu, Kuang-Hsiu Chen +2 more |
2018-05-08 |
| 9960084 |
Method for forming semiconductor device |
Kuang-Hsiu Chen, Chun-Wei Yu, Chueh-Yang Liu, Wen-Jiun Shen, Yu-Ren Wang |
2018-05-01 |
| 9899520 |
Method for fabricating semiconductor device |
Kuang-Hsiu Chen, Chueh-Yang Liu, Yu-Ren Wang |
2018-02-20 |
| 9793105 |
Fabricating method of fin field effect transistor (FinFET) |
Chun-Wei Yu, Hsu Ting, Chueh-Yang Liu, Yu-Ren Wang, Kuang-Hsiu Chen |
2017-10-17 |
| 9748111 |
Method of fabricating semiconductor structure using planarization process and cleaning process |
Kuang-Hsiu Chen, Chueh-Yang Liu, Yu-Ren Wang |
2017-08-29 |
| 9627534 |
Semiconductor MOS device having a dense oxide film on a spacer |
Kuang-Hsiu Chen, Chueh-Yang Liu, Yu-Ren Wang |
2017-04-18 |
| 9613808 |
Method of forming multilayer hard mask with treatment for removing impurities and forming dangling bonds |
Kuang-Hsiu Chen, Chueh-Yang Liu, Yu-Ren Wang |
2017-04-04 |
| 9570315 |
Method of interfacial oxide layer formation in semiconductor device |
Chueh-Yang Liu, Ted Ming-Lang Guo, Yu-Ren Wang |
2017-02-14 |