YR

Yan Rubin

NS Novellus Systems: 1 patents #479 of 780Top 65%
Overall (All Time): #3,416,226 of 4,157,543Top 85%
1
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
7042311 RF delivery configuration in a plasma processing system Stephen E. Hilliker, Anthony Sebastian, George Thomas 2006-05-09