Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8617348 | Modulating etch selectivity and etch rate of silicon nitride thin films | Chiukin Steven Lai | 2013-12-31 |
| 8187486 | Modulating etch selectivity and etch rate of silicon nitride thin films | Chiukin Steven Lai | 2012-05-29 |
| 8043972 | Adsorption based material removal process | Joshua Collins, Kaihan Ashtiani | 2011-10-25 |
| 7977249 | Methods for removing silicon nitride and other materials during fabrication of contacts | Yu-Chi Yang, Chiukin Steven Lai | 2011-07-12 |
| 7416989 | Adsorption based material removal process | Joshua Collins, Kaihan Ashtiani | 2008-08-26 |
| 6037003 | Chemical vapor deposition of aluminum oxide | Roy G. Gordon, Keith S. Kramer | 2000-03-14 |