Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12211711 | Baking apparatus | Bumjin Jang, Seunghwa Kang, Sungyong Park, Ansook Sul, Kiju Sohn | 2025-01-28 |
| 11590460 | Chemical solution evaporation device and substrate processing device including the same | Sungyong Park, Hongju Kim, Ansook Sul, Seok-Won Heo, Yinghu Xu | 2023-02-28 |
| 10532896 | Grip apparatus and substrate inspection system including the same, and method of manufacturing semiconductor device using the substrate inspection system | Kuihyun Yoon, Young Heo | 2020-01-14 |
| 10006872 | Optical inspection system | Kyoungchon Kim, Kuihyun Yoon, Kyunlae Kim, Jaeyoung Park, Kyoungho Yang +1 more | 2018-06-26 |