Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7923359 | Reduction of sheet resistance of phosphorus implanted poly-silicon | Stephan Gross | 2011-04-12 |
| 5268311 | Method for forming a thin dielectric layer on a substrate | Dieter Hagmann, Hans-Jurgen Wildau | 1993-12-07 |
| 5139869 | Thin dielectric layer on a substrate | Dieter Hagmann, Hans-Jurgen Wildau | 1992-08-18 |
| 5051377 | Method for forming a thin dielectric layer on a substrate | Dieter Hagmann, Hans-Jurgen Wildau | 1991-09-24 |
| 4869781 | Method for fabricating a semiconductor integrated circuit structure having a submicrometer length device element | Dieter Hagmann, Hans-Joachim Trumpp | 1989-09-26 |