Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4731343 | Method for manufacturing insulation separating the active regions of a VLSI CMOS circuit | — | 1988-03-15 |
| 4658496 | Method for manufacturing VLSI MOS-transistor circuits | Gerhard Enders, Ernst Mohr | 1987-04-21 |
| 4479850 | Method for etching integrated semiconductor circuits containing double layers consisting of polysilicon and metal silicide | Barbara Hasler | 1984-10-30 |
| 4473436 | Method of producing structures from double layers of metal silicide and polysilicon on integrated circuit substrates by RIE utilizing SF.sub.6 and Cl.sub.2 | — | 1984-09-25 |
| 4380489 | Method of producing polysilicon structure in the 1 .mu.m range on substrates containing integrated semiconductor circuits by plasma etching | Barbara Hasler | 1983-04-19 |
| 4360414 | Method of producing structures comprised of layers consisting of silicides or silicide-polysilicon by reactive sputter etching | — | 1982-11-23 |