| 11466360 |
Enhanced cathodic ARC source for ARC plasma deposition |
Boris L. Druz, Yuriy N. Yevtukhov, Sandeep Kohli, Xingjie Fang |
2022-10-11 |
| 9206500 |
Method and apparatus for surface processing of a substrate using an energetic particle beam |
Boris L. Druz, Roger P. Fremgen, Alan V. Hayes, Robert Krause, Ira Reiss +1 more |
2015-12-08 |
| 8835869 |
Ion sources and methods for generating an ion beam with controllable ion current density distribution |
Rustam Yevtukhov, Boris L. Druz, Alan V. Hayes |
2014-09-16 |
| 8158016 |
Methods of operating an electromagnet of an ion source |
Alan V. Hayes, Rustam Yevtukhov, Boris L. Druz |
2012-04-17 |
| 7879201 |
Method and apparatus for surface processing of a substrate |
Boris L. Druz, Hariharakeshave S. Hegde, Alan V. Hayes, Emmanuel Lakios |
2011-02-01 |
| 7557362 |
Ion sources and methods for generating an ion beam with a controllable ion current density distribution |
Rustam Yevtukhov, Alan V. Hayes, Boris L. Druz |
2009-07-07 |
| 7414355 |
Charged particle beam extraction and formation apparatus |
Alan V. Hayes, Rustam Yevtukhov, Daniel Yakovlevitch |
2008-08-19 |
| 7183716 |
Charged particle source and operation thereof |
Alan V. Hayes, Rustam Yevtukhov, Ira Reiss, Roger P. Fremgen, Adrian Celaru +5 more |
2007-02-27 |
| 7005782 |
Charged particle beam extraction and formation apparatus |
Alan V. Hayes, Rustam Yevtukhov, Daniel Yakovlevitch |
2006-02-28 |
| 6774550 |
Charged particle beam extraction and formation apparatus |
Alan V. Hayes, Rustam Yevtukhov, Daniel Yakovlevitch |
2004-08-10 |
| 6716322 |
Method and apparatus for controlling film profiles on topographic features |
Hari Hedge, Alan V. Hayes, Boris L. Druz, Adrian Devasahayam, Emmanuel Lakios |
2004-04-06 |
| 6590324 |
Charged particle beam extraction and formation apparatus |
Alan V. Hayes, Rustam Yevtukhov, Daniel Yakovlevitch |
2003-07-08 |