Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9783410 | Method for producing a component | Wolfram Geiger, Martin Hafen, Guenter Spahlinger | 2017-10-10 |
| 8258590 | Method for the production of a component, and component | Wolfram Geiger | 2012-09-04 |
| 7964428 | Micromechanical component and method for fabricating a micromechanical component | Wolfram Geiger | 2011-06-21 |
| 6863832 | Method for producing a torsion spring | Maik Wiemer, Karla Hiller, Detlef Billep, Bruno Rvrko, Eberhard Handrich | 2005-03-08 |
| 6490923 | Micromechanical rpm sensor | Martin Hafen, Eberhard Handrich, Bruno Ryrko | 2002-12-10 |
| 6119517 | Micro-mechanical rate-of-rotation sensor with coupled structure | Bruno Ryrko, Steffen Zimmermann | 2000-09-19 |
| 5959206 | Micromechanical rotation speed sensor | Bruno Ryrko, Eberhard Handrich, Martin Hafen | 1999-09-28 |