| 6490923 |
Micromechanical rpm sensor |
Uwe Breng, Martin Hafen, Eberhard Handrich |
2002-12-10 |
| 6374671 |
Method of stimulating an oscillator control for capacitive measurement of strength, acceleration and/or rotation speed |
Gunter Spahlinger, Walter Gutmann |
2002-04-23 |
| 6119517 |
Micro-mechanical rate-of-rotation sensor with coupled structure |
Uwe Breng, Steffen Zimmermann |
2000-09-19 |
| 5959206 |
Micromechanical rotation speed sensor |
Eberhard Handrich, Uwe Breng, Martin Hafen |
1999-09-28 |
| 5614742 |
Micromechanical accelerometer with plate-like semiconductor wafers |
Thomas Gessner, Martin Hafen, Eberhard Handrich, Peter Leinfelder, Egbert Vetter +1 more |
1997-03-25 |
| 5504032 |
Micromechanical accelerometer and method of manufacture thereof |
Thomas Gessner, Martin Hafen, Eberhard Handrich, Peter Leinfelder, Egbert Vetter +1 more |
1996-04-02 |
| 4953834 |
Pendulum with bending spring joint |
Wolfram Ebert, Eberhard Handrich, Martin Hafen |
1990-09-04 |