Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11845090 | Nozzle apparatus, apparatus and method for treating substrate | Chang Suk OH, Woo Sin JUNG | 2023-12-19 |
| 9748117 | Substrate treating apparatus and substrate treating method | Sungun Kim | 2017-08-29 |