TT

Tom Tillery

MT Mattson Technology: 2 patents #87 of 230Top 40%
BC Beijing E-Town Semiconductor Technology Co.: 1 patents #49 of 72Top 70%
Overall (All Time): #1,886,802 of 4,157,543Top 50%
2
Patents All Time

Issued Patents All Time

Patent #TitleCo-InventorsDate
11107693 Method for high aspect ratio photoresist removal in pure reducing plasma Li Diao, Robert George Elliston, David Gilbert, Chan-Yun Lee, James Paris +2 more 2021-08-31
10431469 Method for high aspect ratio photoresist removal in pure reducing plasma Li Diao, Robert George Elliston, David Gilbert, Chan-Yun Lee, James Paris +2 more 2019-10-01