Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6264165 | Stage and supporting mechanism for supporting movable mirror on stage | Yutaka Hayashi | 2001-07-24 |
| 6222614 | Exposure elements with a cable-relaying support | — | 2001-04-24 |
| 6211946 | Stage unit, drive table, and scanning exposure apparatus using the same | Hiroto Horikawa | 2001-04-03 |
| 6012697 | Stage and supporting mechanism for supporting movable mirror on stage | Yutaka Hayashi | 2000-01-11 |
| 5850280 | Stage unit, drive table, and scanning exposure and apparatus using same | Hiroto Horikawa | 1998-12-15 |