| 11624668 |
Methods for fabricating pressure sensors with non-silicon diaphragms |
— |
2023-04-11 |
| 10378985 |
Methods for fabricating pressure sensors with non-silicon diaphragms |
— |
2019-08-13 |
| 9969608 |
Methods for mounting a MEMS sensor for in-stream measurements |
Danny Do, Gary Winzeler, Emir Vukotic |
2018-05-15 |
| 9804046 |
Pressure sensor with support structure for non-silicon diaphragm |
— |
2017-10-31 |
| 9625486 |
MEMS accelerometer |
— |
2017-04-18 |
| 9581511 |
Microelectromechanical pressure sensors |
Leslie Bruce Wilner |
2017-02-28 |
| 9581614 |
High-output MEMS accelerometer |
— |
2017-02-28 |
| 9506827 |
Pressure sensors and methods of making the same |
— |
2016-11-29 |
| 9257247 |
Low-G MEMS acceleration switch |
— |
2016-02-09 |
| 9212054 |
Pressure sensors and methods of making the same |
— |
2015-12-15 |
| 8779534 |
Low-G MEMS acceleration switch |
— |
2014-07-15 |
| 8371160 |
Weatherized direct-mount absolute pressure sensor |
Don L. Danielson |
2013-02-12 |
| 8330224 |
Integrated MEMS and ESD protection devices |
— |
2012-12-11 |
| 8191420 |
Proof mass for maximized, bi-directional and symmetric damping in high g-range acceleration sensors |
Leslie Bruce Wilner |
2012-06-05 |
| 7696083 |
Multi-layer device |
Linh Le, Nina Tikhomirova |
2010-04-13 |
| 6543087 |
Micro-electromechanical hinged flap structure |
J. Andrew Yeh, Robertus Petrus Van Kampen |
2003-04-08 |