| 9581511 |
Microelectromechanical pressure sensors |
Tom Kwa |
2017-02-28 |
| 8191420 |
Proof mass for maximized, bi-directional and symmetric damping in high g-range acceleration sensors |
Tom Kwa |
2012-06-05 |
| 8146436 |
Silicon sensing structure to detect through-plane motion in a plane of material with thermal expansion substantially different from that of silicon |
James Tjan-Meng Suminto |
2012-04-03 |
| 8115265 |
Interconnection system on a plane adjacent to a solid-state device structure |
— |
2012-02-14 |
| 8096188 |
Highly sensitive piezoresistive element |
— |
2012-01-17 |
| 7987716 |
Coupled pivoted acceleration sensors |
— |
2011-08-02 |
| 7690272 |
Flexural pivot for micro-sensors |
— |
2010-04-06 |
| 7594440 |
Highly sensitive piezoresistive element |
— |
2009-09-29 |
| 7392716 |
Piezoresistive strain concentrator |
— |
2008-07-01 |
| 7276794 |
Junction-isolated vias |
— |
2007-10-02 |
| 7146865 |
Piezoresistive strain concentrator |
— |
2006-12-12 |
| 6988412 |
Piezoresistive strain concentrator |
— |
2006-01-24 |
| 6670538 |
Thermal radiation sensor |
Andrew Meyer, James Tjan-Meng Suminto, Joseph S. Fragala |
2003-12-30 |
| 6593651 |
Terminals for multi-layer devices |
— |
2003-07-15 |
| 4825335 |
Differential capacitive transducer and method of making |
— |
1989-04-25 |
| 4793194 |
Piezoresistive transducer |
— |
1988-12-27 |
| 4737473 |
Piezoresistive transducer |
— |
1988-04-12 |
| 4689600 |
Piezoresistive transducer having frangible links |
— |
1987-08-25 |
| 4609968 |
Glass inlays for use in bonding semiconductor wafers |
— |
1986-09-02 |
| 4605919 |
Piezoresistive transducer |
— |
1986-08-12 |
| 4574327 |
Capacitive transducer |
— |
1986-03-04 |
| 4498229 |
Piezoresistive transducer |
— |
1985-02-12 |
