Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6683012 | Method for epitaxially growing crystalline insulation layer on crystalline silicon substrate while simultaneously growing silicon oxide, nitride, or oxynitride | Kimihiro Sasaki, Akira Kamisawa | 2004-01-27 |
| 6232242 | Method of forming a crystalline insulation layer on a silicon substrate | Kimihiro Sasaki, Akira Kamisawa | 2001-05-15 |
| 4971674 | Magnetron sputtering method and apparatus | — | 1990-11-20 |
| 4880515 | Surface treatment method | Masato Yoshikawa, Yukihiro Kusano, Kazuo Naito, Toshio Honda | 1989-11-14 |