Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6683012 | Method for epitaxially growing crystalline insulation layer on crystalline silicon substrate while simultaneously growing silicon oxide, nitride, or oxynitride | Tomonobu Hata, Akira Kamisawa | 2004-01-27 |
| 6232242 | Method of forming a crystalline insulation layer on a silicon substrate | Tomonobu Hata, Akira Kamisawa | 2001-05-15 |