Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11011703 | Semiconductor device and manufacturing method thereof | Qiang Ma, Yanlei Ping | 2021-05-18 |
| 9223229 | Exposure device and exposure method | Qiang Wu, Jing'an Hao, Chang-Miao Liu, Xin Yao, Qiang SHU +1 more | 2015-12-29 |
| 9134624 | Lithography machine and scanning and exposing method thereof | Qiang Wu, Jing'an Hao, Chang-Miao Liu, Xin Yao, Qiang SHU +1 more | 2015-09-15 |