Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8932405 | Apparatus for low-temperature epitaxy on a plurality semiconductor substrates | George Ritter, Bernd Tillack | 2015-01-13 |
| 7244667 | Method and device for the production of thin epitaxial semiconductor layers | Bernd Tillack, Dirk Wolansky, Georg Ritter | 2007-07-17 |