Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6561213 | Fluid distribution system and process, and semiconductor fabrication facility utilizing same | Luping Wang, James Dietz | 2003-05-13 |
| 6453924 | Fluid distribution system and process, and semiconductor fabrication facility utilizing same | Luping Wang, James Dietz | 2002-09-24 |
| 6079252 | Leak detection device, and fluid vessel assembly comprising same | Steven M. Lurcott | 2000-06-27 |